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Ultra-high vacuum multi-chamber system (RCIQE clean room)

RIBE PL
RIBE
 　
PL
Contactless C-V MBE
Contactless C-V
 　
MBE
XPS ECR-CVD
XPS
 　
ECR-CVD
STM EB evaporator/PECVD
STM
 　
EB evaporator/PECVD

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