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 Research Center For Integrated Quantum Electronics, Hokkaido University
       
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Main Facility
Ultra-high vacuum multi-chamber system Molecular beam epitaxy (MBE) chamber
Ultra-high vacuum multi-chamber system
（↑A photograph is clicked.）
 　
Molecular beam epitaxy (MBE) chamber
Mask aligner in photolithography room Superconducting magnet system
Mask aligner in photolithography room
 　
Superconducting magnet system
Prober TEM
Prober
 　
TEM
SEM AFM/STM
SEM
 　
AFM/STM
Others
PL, CL, Raman, FTIR, XRD, Network analyzer, FIB, Dilution refrigerator

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